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MEMS and Si micromachined circuits for high-frequency applications

✍ Scribed by Katehi, L.P.B.; Harvey, J.F.; Brown, E.

Book ID: 114554301
Publisher: IEEE
Year: 2002
Tongue: English
Weight: 557 KB
Volume: 50
Category: Article
ISSN: 0018-9480
DOI: 10.1109/22.989969

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## Special Issue on RF Applications of MEMS and Micromachining Micromachining is a new paradigm in IC fabrication that has spawned many new developments in a variety of electronic fields. Bulk and surface micromachining techniques are used to create miniature mechanical Ž . structures on an integra