𝔖 Bobbio Scriptorium
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Surface micromachined solenoid inductors for high frequency applications

✍ Scribed by Yong-Jun Kim; Allen, M.G.

Book ID
114560642
Publisher
IEEE
Year
1998
Weight
576 KB
Volume
21
Category
Article
ISSN
1083-4400

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## Abstract This article reports on‐chip micromachined solenoidal inductors with high radio‐frequency (RF) performance. The RF components can be either used in multi‐GHz telecommunication modules with a system in package scheme or monolithically integrated in RFICs with a post‐CMOS integration meth