This paper reports on the development of a broadband, low insertion loss, ohmic-contact MEMs switch for microwave and millimeter-wave applications. The switch is surface-micromachined and electrostatically-actuated with electromechanical performance simulated with analytical and numerical models tha
Surface micromachined high-performance RF MEMS inductors
β Scribed by Dong-Ming Fang; Yong Zhou; Xi-Ning Wang; Xiao-Lin Zhao
- Book ID
- 106185165
- Publisher
- Springer-Verlag
- Year
- 2006
- Tongue
- English
- Weight
- 234 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0946-7076
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
## Abstract This article reports onβchip micromachined solenoidal inductors with high radioβfrequency (RF) performance. The RF components can be either used in multiβGHz telecommunication modules with a system in package scheme or monolithically integrated in RFICs with a postβCMOS integration meth
## Abstract A 4.5βturn spiral inductor with tapered Cu metal width (__ΞW__ = 3 ΞΌm) fabricated on normal silicon substrate (βΌ750 ΞΌm) exhibited a high quality factor of 9.68 at 2.0 GHz, which is 18.8% higher than that (8.15) of a 4.5βturn spiral inductor with comparable outer dimension and equal Cu m