High-Level Fault Modeling in Surface-Micromachined MEMS
β Scribed by N. Deb; R. D. (Shawn) Blanton
- Book ID
- 110298945
- Publisher
- Springer
- Year
- 2001
- Tongue
- English
- Weight
- 161 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0925-1030
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
## Abstract Stiction, or adhesion of components to one another, is a major failure mechanism in surface micromachined MEMS. In this paper we discuss roughening of the surface of polysilicon, which forms the structural layer in surface micromachining, by the formation of porous silicon and its effec
Reo is a channel-based coordination language, wherein circuit-like connectors model and implement interaction protocols in heterogeneous environments that coordinate components or services. Connectors are constructed from primitive channels and can be reconfigured dynamically. Reconfigurations can e