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Mechanistic study on interlayer dielectric breakdown in integrated circuits

✍ Scribed by Peng Wang

Book ID: 113784153
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 357 KB
Volume: 128
Category: Article
ISSN: 0254-0584
DOI: 10.1016/j.matchemphys.2011.03.025

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