Properties of liquid-phase-deposited SiO2 films for interlayer dielectrics in ultralarge-scale integrated circuit multilevel interconnections

✍ Scribed by Tetsuya Homma; Yukinobu Murao

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 613 KB
• Volume: 249
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(94)90079-5