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Mechanism and applications of local droplet etching

✍ Scribed by Ch. Heyn; A. Stemmann; M. Klingbeil; Ch. Strelow; T. Köppen; S. Mendach; W. Hansen


Book ID
108166201
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
762 KB
Volume
323
Category
Article
ISSN
0022-0248

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Silver-assisted electroless etching mech
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## Abstract The morphology of metal‐assisted electroless etched n‐type silicon in HF–oxidizing agent–H~2~O etching system as a function of oxidizing type and etching time was studied. Three types of oxidizing agent were investigated: Na~2~S~2~O~8~, K~2~Cr~2~O~7~ and KMnO~4~. The layers formed on si