✦ LIBER ✦

Silicon etching techniques and application to mechanical devices

✍ Scribed by T. Bourouina; S. Spirkovitch; F. Marty; F. Baillieu; E. Donzier

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Deep etching of silicon carbide for micr

✍ Chabert, P. 📂 Article 📅 2001 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 694 KB

Micro-opto-mechanical devices fabricated

✍ Uenishi, Y; Tsugai, M; Mehregany, M 📂 Article 📅 1995 🏛 Institute of Physics 🌐 English ⚖ 754 KB

Sputter-etch plus evaporated film techni

📂 Article 📅 1978 🏛 Elsevier Science 🌐 English ⚖ 154 KB

In German).

Applications of the silicon wafer direct

✍ K. Furukawa; A. Nakagawa 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 526 KB

Thin-film techniques applied to silicon

✍ H.V. Shurmer; J.A. Tole; Associated Electrical Industries Limited 📂 Article 📅 1965 🏛 Elsevier Science 🌐 English ⚖ 147 KB

Application of wet chemical selective et

✍ B. Schmidt; J. von Borany; D. Schubert 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 407 KB