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Mechanical resistance of patterned BCB bonded joints for MEMS packaging

✍ Scribed by Cuminatto, C.; Braccini, M.; Schelcher, G.; Parry, G.; Parrain, F.


Book ID
123035434
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
759 KB
Volume
111
Category
Article
ISSN
0167-9317

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