✦ LIBER ✦

Mechanical processes in chemical-mechanical planarization: Plasticity effects in oxide thin films

✍ Scribed by Krishna Rajan

Book ID: 107457746
Publisher: Springer US
Year: 1998
Tongue: English
Weight: 77 KB
Volume: 27
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-998-0146-8

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