Surface-complex films of guanidine on tantalum nitride electrochemically characterized for applications in chemical mechanical planarization

✍ Scribed by S.E. Rock; D.J. Crain; C.M. Pettit; D. Roy

• Book ID: 113937501
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 727 KB
• Volume: 520
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2011.12.005