✦ LIBER ✦
Electrochemical characterization of surface complexes formed on Cu and Ta in succinic acid based solutions used for chemical mechanical planarization
✍ Scribed by Christopher M. Sulyma; Dipankar Roy
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 653 KB
- Volume
- 256
- Category
- Article
- ISSN
- 0169-4332
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