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Mechanical characterization by acoustic techniques of SiC chemical-vapour-deposited thin films

✍ Scribed by J.M. Saurel; K. Alami; C.Amaudric du Chaffaut; O. Dugne; A. Guette

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 349 KB
Volume: 122
Category: Article
ISSN: 0921-5093
DOI: 10.1016/0921-5093(89)90766-1

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