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Mechanical and structural properties of RF magnetron sputter-deposited silicon carbide films for MEMS applications

โœ Scribed by Singh, Atul Vir; Chandra, Sudhir; Kumar, Sushil; Bose, G

Book ID
120925198
Publisher
Institute of Physics
Year
2012
Tongue
English
Weight
557 KB
Volume
22
Category
Article
ISSN
0960-1317

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Piezoelectric Nb-doped Pb(Zr,Ti)O 3 thin films (PNZT) were deposited on stainless steel and silicon wafer substrates using RF-magnetron sputtering with the aim of micro-electromechanical systems (MEMS) applications. The obtained films on both kinds of substrates were strongly uniaxially oriented, fo