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Measuring residual stress of anisotropic thin film by fast Fourier transform

✍ Scribed by Tien, Chuen-Lin; Zeng, Hung-Da

Book ID: 115413476
Publisher: Optical Society of America
Year: 2010
Tongue: English
Weight: 856 KB
Volume: 18
Category: Article
ISSN: 1094-4087
DOI: 10.1364/OE.18.016594

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