The measurement of anisotropic stress in obliquely-deposited thin films by fast Fourier transform and Gaussian filter

✍ Scribed by Chuen-Lin Tien; Tsai-Wei Lin; Shiao-Shan Jyu; Hung-Da Tseng; Chern-Sheng Lin; Ming-Chung Liu

• Book ID: 113846572
• Publisher: Elsevier
• Year: 2011
• Tongue: English
• Weight: 500 KB
• Volume: 19
• Category: Article
• ISSN: 1875-3892
• DOI: 10.1016/j.phpro.2011.06.120