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Measurements of thin oxide films of SiO2/Si(100)

✍ Scribed by W.N. Lennard; G.R. Massoumi; I.V. Mitchell; H.T. Tang; D.F. Mitchell; J.A. Bardwell

Book ID: 113285787
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 541 KB
Volume: 85
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(94)95782-7

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