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Photoacoustic spectroscopy of thin SiO2films grown on (100) crystalline Si substrates

✍ Scribed by A. Mandelis; E. Siu; S. Ho

Publisher: Springer
Year: 1984
Tongue: English
Weight: 572 KB
Volume: 33
Category: Article
ISSN: 1432-0630
DOI: 10.1007/bf00618748

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