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Attenuation length of photoelectrons in thin films of SiO2 grown on Si

✍ Scribed by J Peisner; G Aszódi; M Németh-Sallay; G Forgács


Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
177 KB
Volume
36
Category
Article
ISSN
0040-6090

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Thin oxide Ðlms play an important role in the corrosion of metals. Using XPS it is possible in principle to obtain information on the chemical state of near-surface atoms, the stoichiometry of the surface layer and its thickness. A problem is the quantiÐcation of XPS spectra, due to the large uncert