Examination of pits appearing on selectively grown Si film on SiO2 patterned wafers

✍ Scribed by H. Kanaya; S. Imai; N. Sugiyama

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 399 KB
• Volume: 165
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(96)00243-6