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Local Stress Measurement in Thin Thermal SiO2 Films on Si Substrates

✍ Scribed by Lin, S. C. H.

Book ID: 120065975
Publisher: American Institute of Physics
Year: 1972
Tongue: English
Weight: 942 KB
Volume: 43
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1660794

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