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Measurement of the rf Magnetic Field Distribution in a Thermal Induction Plasma

โœ Scribed by Eckert, H. U.


Book ID
126954941
Publisher
American Institute of Physics
Year
1971
Tongue
English
Weight
538 KB
Volume
42
Category
Article
ISSN
0021-8979

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Magnetic field measurements for N2 and H
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The electric field due to a strong capacitive coupling between the induction coil and the walls of the plasma chamber is quite large despite the discharge being in the H-mode in N 2 and H 2 gases. And as such, this field will interfere with the measurement of the magnetic field thus causing a high d