Self-Consistent Model of an RF Inductive Plasma Source Located in an External Magnetic Field

✍ Scribed by A. F. Aleksandrov; G. E. Bugrov; I. F. Kerimova; S. G. Kondranin; E. A. Kralkina; V. B. Pavlov; V. Yu. Plaksin; A. A. Rukhadze; K. V. Vavilin

• Book ID: 111546026
• Publisher: Springer US
• Year: 2003
• Tongue: English
• Weight: 395 KB
• Volume: 24
• Category: Article
• ISSN: 1573-8760
• DOI: 10.1023/a:1024891824073