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Self-consistent model of an inductive RF plasma source in an external magnetic field

✍ Scribed by A. F. Aleksandrov; G. É. Bugrov; K. V. Vavilin; I. F. Kerimova; S. G. Kondranin; E. A. Kral'kina; V. B. Pavlov; V. Yu. Plaksin; A. A. Rukhadze

Book ID: 110138753
Publisher: SP MAIK Nauka/Interperiodica
Year: 2004
Tongue: English
Weight: 224 KB
Volume: 30
Category: Article
ISSN: 1063-780X
DOI: 10.1134/1.1744949

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