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Measurement of short lengths with a scanning electron microscope

✍ Scribed by O. V. Bogdankevich; Zh. Zhelkobaev; V. V. Kalendin; Yu. A. Kudeyarov; L. N. Nevsorova

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Measurement of linear dimensions of subm

✍ V. A. Danilov; Yu. A. Novikov; A. V. Rakov; I. Yu. Stekolin 📂 Article 📅 1995 🏛 Springer US 🌐 English ⚖ 290 KB

Measuring the diameter of an electron pr

✍ Yu. A. Novikov; A. V. Rakov; I. Yu. Stekolin 📂 Article 📅 1995 🏛 Springer US 🌐 English ⚖ 228 KB

Four-probe resistance measurements of ni

✍ E.E. Ehrichs; W.F. Smith; A.L. de Lozanne 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 491 KB

Overlay measurement using the low voltag

✍ M.G. Rosenfield; A. Starikov 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 548 KB

Height measurements of surface features

✍ J.K. Maurin; R.E. Allred 📂 Article 📅 1977 🏛 Elsevier Science ⚖ 770 KB

Measurement of small lengths with micros

✍ A. I. Kritsyn 📂 Article 📅 1982 🏛 Springer US 🌐 English ⚖ 159 KB