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Measurement of dielectric property distribution in thin films on a metallic base

✍ Scribed by V. V. Kozharinov; V. I. Krylovich; V. A. Kryukov

Book ID
104972409
Publisher
Springer US
Year
1992
Tongue
English
Weight
189 KB
Volume
62
Category
Article
ISSN
1573-871X

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## Abstract A procedure to include conductor loss in interdigital capacitor based dielectric constant measurements is proposed. The effect of conductor loss and contact resistance can be regarded as a series resistor connected to the interdigital capacitor. If the thickness of the conductor film is