Interfacial properties of metal-silicon oxide-metal structures in relation to the non-stoichiometry of a thin film dielectric

✍ Scribed by T. Pisarkiewicz

• Publisher: Elsevier Science
• Year: 1980
• Tongue: English
• Weight: 286 KB
• Volume: 67
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(80)90286-2