𝔖 Bobbio Scriptorium
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Measurement of boron impurity profiles in Si using glow discharge optical spectroscopy

✍ Scribed by Greene, J. E.

Book ID
120477334
Publisher
American Institute of Physics
Year
1974
Tongue
English
Weight
558 KB
Volume
25
Category
Article
ISSN
0003-6951

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Depth profiling of thin surface layers using the amplitude modulation method in radiofrequency-powered glow discharge optical emission spectrometry
✍ Wagatsuma, Kazuaki πŸ“‚ Article πŸ“… 1999 πŸ› John Wiley and Sons 🌐 English βš– 128 KB πŸ‘ 2 views

A novel technique for accurate in-depth analysis of thin layers is described. Radiofrequency voltages applied to a Grimm-style glow discharge lamp are modulated at a very low frequency, which leads to a reduction in the sputtering rate and variation of the emission signals at the speciÐc modulation