✦ LIBER ✦
Use of optical emission spectroscopy to investigate the process of fabrication ofa-Si:H films in a combined silane-containing discharge
✍ Scribed by D. I. Grunskii
- Book ID
- 110621554
- Publisher
- Springer US
- Year
- 2000
- Tongue
- English
- Weight
- 402 KB
- Volume
- 67
- Category
- Article
- ISSN
- 0021-9037
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