Depth profiling of thin surface layers using the amplitude modulation method in radiofrequency-powered glow discharge optical emission spectrometry
✍ Scribed by Wagatsuma, Kazuaki
- Publisher
- John Wiley and Sons
- Year
- 1999
- Tongue
- English
- Weight
- 128 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0142-2421
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✦ Synopsis
A novel technique for accurate in-depth analysis of thin layers is described. Radiofrequency voltages applied to a Grimm-style glow discharge lamp are modulated at a very low frequency, which leads to a reduction in the sputtering rate and variation of the emission signals at the speciÐc modulation frequency. With amplitude modulation associated with phase-sensitive detection, the resultant emission intensities can be measured with better signalto-noise ratios, although the sputtering rate and the sampling amount are reduced by a factor of ¿10. It is possible to obtain the depth proÐle of a 13 nm thick Ni-electroplated layer, whereas proÐling is difficult for conventional detection.