Dopant concentration measurements in hyd
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J.C. Zesch; R.A. Lujan; V.R. Deline
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Article
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1980
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Elsevier Science
β 350 KB
R.f. glow discharge optical spectroscopy (GDOS) is demonstrated to be a useful technique with which to measure absolute dopant concentrations in hydrogenated amorphous silicon (a-Si:H) films. The measurement technique and method of calibration are described. GDOS measurements of boron concentrations