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Measurement, modelling and simulation of defects in as-grown Czochralski silicon

✍ Scribed by J. Vanhellemont; S. Senkader; G. Kissinger; V. Higgs; M.-A. Trauwaert; D. Gräf; U. Lambert; P. Wagner


Book ID
108342529
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
650 KB
Volume
180
Category
Article
ISSN
0022-0248

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