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MBE-grown ZnO film on sapphire substrate with double buffer layers

✍ Scribed by Xinqiang Wang; Hiroyuki Iwaki; Yoshihiro Ishitani; Akihiko Yoshikawa


Book ID
104556118
Publisher
John Wiley and Sons
Year
2004
Tongue
English
Weight
262 KB
Volume
1
Category
Article
ISSN
1862-6351

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## Abstract La~0.67~Sr~0.33~MnO~3~ (LSMO) manganite thin films were deposited using a magnetron dc sputtering on single crystalline GaAs(001) substrates covered by MgO buffer layers with the goal to fabricate, using MEMS technology, a microbolometer operating at room temperature. The crystalline pe