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Effects of annealing of MgO buffer layer on structural quality of ZnO layers grown by P-MBE on c-sapphire

โœ Scribed by A. Setiawan; H.J. Ko; T. Yao


Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
334 KB
Volume
6
Category
Article
ISSN
1369-8001

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ZnO nanorods on seed-layers were grown by the hydrothermal method. The seed-layers were grown by plasma-assisted molecular beam epitaxy (PA-MBE) and then in-situ annealed in O 2 plasma at the temperatures of 500, 700, and 800 1C, respectively. The effects of annealing temperature of the MBEseed-laye