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Matrix effects in sims depth profiles of SiGe superlattices

โœ Scribed by J.A. Jackman; L. Dignard-Bailey; R.S. Storey; C. MacPherson; S. Rolfe; L. Van Der Zwan; T.E. Jackman


Book ID
113281305
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
500 KB
Volume
45
Category
Article
ISSN
0168-583X

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Nature of noise in SIMS depth profiling
โœ Makarov, V. V. ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 60 KB ๐Ÿ‘ 1 views

The nature of noise in SIMS depth profiling data has been investigated theoretically. I show that, as earlier experiments proved, the noise of the signal measured with a perfect (absolutely stable) SIMS instrument obeys Poisson's law. Theoretical analysis of the contributions from statistical fluctu