A complete nonlinear finite element model for coupled-domain MEMS devices with electrostatic actuation and squeeze film effect is developed in this study. For this purpose, a co-rotational finite element formulation for the dynamic analysis of planer Euler-Bernoulli micro-beams considering geometric
β¦ LIBER β¦
Mathematical analysis and test of an electrostatically actuated micro-power relay
β Scribed by S. J. Jeong; D. E. Lee; W. Wang
- Book ID
- 106185156
- Publisher
- Springer-Verlag
- Year
- 2006
- Tongue
- English
- Weight
- 579 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0946-7076
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