Design and UV-LIGA microfabrication of an electro-statically actuated power relay

✍ Scribed by S. J. Jeong; W. Wang

• Book ID: 106185075
• Publisher: Springer-Verlag
• Year: 2006
• Tongue: English
• Weight: 608 KB
• Volume: 13
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-006-0171-6