Microfabrication of an electromagnetic power relay using SU-8 based UV-LIGA technology

✍ Scribed by J. D. Williams; W. Wang

• Book ID: 106184698
• Publisher: Springer-Verlag
• Year: 2004
• Tongue: English
• Weight: 393 KB
• Volume: 10
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-004-0396-1