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Materials for microlithography: Radiation sensitive polymers: L. F. Thompson, C. G. Willson and J. M. J. Frechet (eds.) American Chemical Society, 1984, 496 pp., US $65,95. ISBN 0-841-20871-9

✍ Scribed by R.A. Pethrick

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 135 KB
Volume: 26
Category: Article
ISSN: 0032-3861
DOI: 10.1016/0032-3861(85)90322-2

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