Materials for microlithography—radiation-sensitive polymers: L.F. Thompson, C.G. Wilson and J.M.J. Fréchet (Eds.), American Chemical Society Symposium Series No. 266, American Chemical Society, Washington, DC, 1984, 494 pages, price in U.S. and Canada $54.95, other countries $65.95

• Publisher: Elsevier Science
• Year: 1985
• Weight: 69 KB
• Volume: 4
• Category: Article
• ISSN: 0167-6989
• DOI: 10.1016/0167-6989(85)90035-2