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Materials for microlithography. Hg. von L. F. THOMPSON, C. C. WILLSON und J. M. FRÉCHET. ASC Symposium Series 266. ISSN 0097-6156; 266. Washington, D. C.: American Chemical Society 1984. VIII, 494 S., geb., US $ 65.95.

✍ Scribed by K. Dietrich

Publisher: John Wiley and Sons
Year: 1985
Tongue: English
Weight: 187 KB
Volume: 36
Category: Article
ISSN: 0323-7648
DOI: 10.1002/actp.1985.010361019

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