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Materials for microlithography: Radiation-sensitive polymers. Edited by L. F. Thompson, C. G. Willson and J. M. J. Frechet, ACS Symposium Series No. 266, American Chemical Society, Washington D.C., 1984. pp. viii+494, price $54.95 (USA & Canada), $65.95 (rest of world). ISBN 0-8412-0871-9

โœ Scribed by Cowie, J. M. G.


Publisher
Wiley (John Wiley & Sons)
Year
1986
Tongue
English
Weight
146 KB
Volume
18
Category
Article
ISSN
0007-1641

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