Introduction to microlithography. Edited by L. F. Thompson, C. G . Willson and M. J. Bowden, ACS Symposium Series No. 219, American Chemical Society, Washington DC, 1983. pp. ix + 363, price £42.95 (USA & Cunada), $51.95 (export). ISBN 0-8412-0775-5

✍ Scribed by Thompson, L. F. ;Cowie, J. M. G.

• Publisher: Wiley (John Wiley & Sons)
• Year: 1986
• Tongue: English
• Weight: 146 KB
• Volume: 18
• Category: Article
• ISSN: 0007-1641
• DOI: 10.1002/pi.4980180426