๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Maskless pattern fabrication on Si(1 0 0) surface by using nanoindenter with KOH wet etching

โœ Scribed by S.W. Youn; C.G. Kang


Book ID
113894778
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
465 KB
Volume
50
Category
Article
ISSN
1359-6462

No coin nor oath required. For personal study only.


๐Ÿ“œ SIMILAR VOLUMES


Thermal oxidation kinetics of an Si1โˆ’xCx
โœ Shuichi Ogawa; Tomofumi Kawamura; Yuji Takakuwa ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 681 KB

To clarify the oxide growth mechanism on strained Si surfaces, the thermal oxidation reaction kinetics of an Si 1-x C x (x 0.1) alloy layer with a c(4 ร— 4) structure grown on Si(0 0 1) surfaces by carbonization with ethylene 636 โ€ข C was investigated using RHEED combined with AES. Upon staring the ox