Resistless patterning of a chlorine mono
Resistless patterning of a chlorine monolayer on a Si(0 0 1) surface with an electron beam
โ
C. Jeon; H.-N. Hwang; H.-J. Shin; C.-Y. Park; C.-C. Hwang
๐
Article
๐
2011
๐
Elsevier Science
๐
English
โ 655 KB