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The surface topography of GaN grown on Si (1 1 1) substrate before and after wet chemical etching

✍ Scribed by Liwei Zhao; Caichi Liu; Xiaoyun Teng; Shilong Sun; Wei Zhang; Junshan Zhu; Yuchun Feng; Baoping Guo

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 354 KB
Volume: 9
Category: Article
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2006.01.024

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The surface topography of GaN grown on Si (1&#xa0;1&#xa0;1) substrate before and after wet chemical etching

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