Resistless patterning of a chlorine monolayer on a Si(0 0 1) surface with an electron beam
โ Scribed by C. Jeon; H.-N. Hwang; H.-J. Shin; C.-Y. Park; C.-C. Hwang
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 655 KB
- Volume
- 257
- Category
- Article
- ISSN
- 0169-4332
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