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Resistless patterning of a chlorine monolayer on a Si(0 0 1) surface with an electron beam

โœ Scribed by C. Jeon; H.-N. Hwang; H.-J. Shin; C.-Y. Park; C.-C. Hwang


Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
655 KB
Volume
257
Category
Article
ISSN
0169-4332

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