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Electron irradiation effect on depth profiling of a SiO2/Si(1 0 0) surface by Auger electron spectroscopy

✍ Scribed by T. Yakabe; D. Fujita; K. Yoshihara

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 100 KB
Volume: 241
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2004.09.029

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Electron irradiation effect on depth profiling of a SiO2/Si(1&#xa0;0&#xa0;0) surface by Auger electron spectroscopy

Electron irradiation effect on depth profiling of a SiO2/Si(1 0 0) surface by Auger electron spectroscopy