Maskless pattern fabrication on Pyrex 7740 glass surface by using nano-scratch with HF wet etching

✍ Scribed by S.W. Youn; C.G. Kang

• Book ID: 113895245
• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 584 KB
• Volume: 52
• Category: Article
• ISSN: 1359-6462
• DOI: 10.1016/j.scriptamat.2004.09.016