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Manufacturing technology for 200mm SIMOX Wafers

✍ Scribed by M. Guerra; B. Cordts; T. Smick; R. Dolan; W. Krull; G. Ryding; M. Alles; M. Anc

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
301 KB
Volume
22
Category
Article
ISSN
0167-9317

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