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A new manufacturing approach for mono-crystalline SiC wafers

✍ Scribed by Fabrice Letertre; Bruno Ghyselen; Bernard Aspar

Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 450 KB
Volume: 15
Category: Article
ISSN: 0961-1290
DOI: 10.1016/s0961-1290(02)85136-5

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